JPS648735U - - Google Patents
Info
- Publication number
- JPS648735U JPS648735U JP10148287U JP10148287U JPS648735U JP S648735 U JPS648735 U JP S648735U JP 10148287 U JP10148287 U JP 10148287U JP 10148287 U JP10148287 U JP 10148287U JP S648735 U JPS648735 U JP S648735U
- Authority
- JP
- Japan
- Prior art keywords
- marking
- wafer
- ink
- marker
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 2
- 239000003550 marker Substances 0.000 claims description 2
- 230000002950 deficient Effects 0.000 claims 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10148287U JPS648735U (en]) | 1987-07-01 | 1987-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10148287U JPS648735U (en]) | 1987-07-01 | 1987-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648735U true JPS648735U (en]) | 1989-01-18 |
Family
ID=31330519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10148287U Pending JPS648735U (en]) | 1987-07-01 | 1987-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648735U (en]) |
-
1987
- 1987-07-01 JP JP10148287U patent/JPS648735U/ja active Pending